Thin film transistors obtained by hot wire CVD
نویسندگان
چکیده
منابع مشابه
Thin-Film Transistors Obtained by Hot Wire CVD
(1) Departament d'Enginyeria Electrònica. Jordi Girona 1-3, Mòdul C4. Universitat Politècnica de Catalunya (Barcelona, Spain). (2) Departament d'Enginyeria Electrònica. Universitat Rovira i Virgili (Tarragona, Spain). (3) Departament de Física Aplicada i Òptica. Universitat de Barcelona (Barcelona, Spain) Abstract Hydrogenated microcrystalline silicon films obtained at low temperature (150oC-28...
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ژورنال
عنوان ژورنال: Journal of Non-Crystalline Solids
سال: 2000
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(99)00942-4